Loading Events

Automated Defect Detection, Mapping and Characterization with the Zeta 3D Optical Profiler

This webinar will discuss detecting, mapping, and insitu optical characterization of defects using the Zeta non-contact 3D surface topography measurement system. The Zeta platform is powered by ZDot™ technology and multi-mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, and smooth to rough texture. It provides topographic step height, roughness and film thickness measurements along with True Color imaging, and diamond scribe marking of defect locations for off-line post-detection analysis. The Zeta family comprises benchtop and fully automated cassette-to-cassette wafer handling to support both R&D and production environments.

Register here

Event Date: Tuesday, November 10, 2020

Back to Events

Are you sure?

You've selected to view this site translated by Google Translate.
KLA China has the same content with improved translations.

Would you like to visit KLA China instead?



If you are a current KLA Employee, please apply through the KLA Intranet on My Access.