This webinar will discuss detecting, mapping, and insitu optical characterization of defects using the Zeta non-contact 3D surface topography measurement system. The Zeta platform is powered by ZDot™ technology and multi-mode optics, enabling measurement of a variety of samples: transparent and opaque, low to high reflectance, and smooth to rough texture. It provides topographic step height, roughness and film thickness measurements along with True Color imaging, and diamond scribe marking of defect locations for off-line post-detection analysis. The Zeta family comprises benchtop and fully automated cassette-to-cassette wafer handling to support both R&D and production environments.

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