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Automated step height metrology for production process monitoring

Making automated measurements in a production fab requires more than just the capability to measure the feature of interest. The system must have precise measurement results to be able to control the process 24x7. The system must have good matching so that any system used will produce the same measurement results. The system must have seamless recipe transportability so that the recipe can be created on a single system or offline software and transferred to any system and operate as good as on the original recipe. Finally, the ability to seamless connect with factory host control for remote tool operation and connecting with factory statistical process control (SPC) systems.

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Event Date: Tuesday, September 22, 2020

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