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Enabling Zero Defectivity Roadmap for SiC based power devices using Candela® 8520

Candela® 8520 is KLA Instrument’s latest bare wafer defect inspection platform for power device materials and applications. It is the successor to the award-winning Candela® CS920. This webinar would discuss how integrated topographic defect detection and photoluminescence technology on Candela 8520 helps SiC power device manufacturers reduce yield loss from epitaxial defects and improve MOCVD reactor process control.

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Event Date: Tuesday, October 6, 2020

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