Tencor® P-7
探针式轮廓仪

Tencor® P-7
探针式轮廓仪

Tencor P-7探针式轮廓仪为生产和研发(R&D)环节提供了从几纳米到一毫米的台阶高度测量功能。该系统支持对台阶高度、粗糙度、翘曲度和应力进行二维(2D)和三维(3D)测量,扫描范围可达150毫米,无需拼接。

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